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Home/ Product/ SPV-100Vacuum Plasma Cleaner

SPV-100Vacuum Plasma Cleaner

Product Comparison

SPV-100列表圖片.png

SPV-100Vacuum Plasma Cleaner

Ultra-low processing temperature of 45℃, no thermal influence, to ensure stable processing effect

Appearance parameters
model numberSPV-100 External dimensions1000*900*1750mm (L*W*H)
weight 500KG Device Appearance Colorsilver grey
Power system
RF Power Supply
power:0~600W frequency:13.56MHz
IF power supply
power0~1000W frequency40KHz
vacuum system
Cavity Internal Dimensions450*450*500mm(W*H*D)
thickness25mm
materialAluminum alloy (customized stainless steel cavity)
tightnessMilitary grade welded seal
Electrode plate effective size322*351mm(W*D)
Available space spacing20mm
working space6 floors
work trayOne set is standard, and the material is optional (aluminum, steel mesh)
Electrode plate layoutHorizontal arrangement, movable extraction
Double stage rotary vane pump (oil pump)60m3/h
vacuum lineAll stainless steel pipes, and high-strength vacuum bellows
gas system
Flow range0~300SCCM Process gas pathStandard air circuit, can be customized
Control System
system controlPLC interactive mode7 inch touch screen

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